Custom Temperature Humidity Chamber for Semiconductor and Component Manufacturing

In the highly sophisticated and competitive semiconductor and component manufacturing industry, the reliability and performance of products are of paramount importance. The Customized Temperature Humidity Climate Chamber is a cutting-edge solution designed to meet the unique and exacting demands of this sector, providing a controlled environment for comprehensive testing and optimization.

• Ultra-Precise and Stable Construction
  The chamber is constructed with a high-strength, low-outgassing alloy framework that provides exceptional rigidity and stability. The interior is lined with a chemically inert and electrostatic dissipative material to prevent any contamination or damage to the sensitive semiconductor samples. The door is engineered with a triple-seal mechanism, incorporating high-precision gaskets and airlocks, ensuring an ultra-tight and stable testing environment. A small, optically clear viewing window, made of anti-reflective and anti-static glass, allows for detailed visual inspection without compromising the internal conditions. The chamber also features a vibration isolation system to minimize any external vibrations that could affect the test results, as even the slightest vibrations can have a significant impact on the performance of semiconductors.
• Precision Temperature and Humidity Control Systems

  Temperature Control: Capable of maintaining an extremely narrow temperature range, from -80°C to +200°C, with an astonishing accuracy of ±0.1°C. It utilizes a combination of cryogenic cooling, resistive heating, and advanced thermal management technologies. The control system incorporates a highly sensitive feedback loop, with multiple platinum resistance temperature detectors (RTDs) strategically placed within the chamber to ensure uniform temperature distribution and minimal thermal gradients.

  Humidity Control: The humidity control system is equally precise, capable of achieving humidity levels from 0% to 100% RH (Relative Humidity), with an accuracy of ±1% RH. It employs a combination of vapor injection, desiccant dehumidification, and chilled mirror hygrometry for accurate measurement and control. The chamber is equipped with a laminar flow system that ensures uniform humidity distribution and rapid humidity adjustments.

• Advanced Instrumentation and Data Acquisition
  The chamber is outfitted with a comprehensive suite of sensors and instrumentation. In addition to temperature and humidity sensors, it includes sensors for measuring electrical parameters such as leakage current, capacitance, and resistance of the tested semiconductors and components. These sensors are connected to a state-of-the-art data acquisition system that records and stores all relevant data.
• Enhanced Safety and Compliance Features
  The chamber is designed with multiple layers of safety features. It incorporates an automatic emergency shutdown system that activates immediately in the event of any critical malfunction. The chamber is equipped with a fire suppression system, ventilation system to remove harmful gases, and safety interlocks on the control panel. Additionally, the chamber complies with all relevant semiconductor industry standards and regulations.

• Chamber Size and Capacity: Available in sizes from small benchtop models to large floor-standing units with volumes up to several cubic meters.
• Temperature Cycling Rate: 4 to 8 cycles per hour, with ramp rates adjustable from 1°C to 10°C per minute.
• Humidity Cycling Rate: Can adjust humidity levels within 5 to 15 minutes.
• Data Acquisition Rate: 3000 samples per second for precise monitoring.
• Compliance: Fully compliant with JEDEC standards and IEC 60068 for environmental testing.

• Accurate Simulation of Semiconductor and Component Operational Environments
  The chamber provides highly accurate simulation of temperature and humidity conditions that semiconductors and components will face during their operational lifespan. This allows for evaluation of product performance and degradation over time, helping manufacturers optimize designs and improve reliability.
• Enhanced Semiconductor and Component Product Quality and Innovation
  Comprehensive testing in the chamber enables identification and resolution of potential design issues, leading to more reliable products. It also serves as a valuable tool for research and development of new materials and technologies.
• Compliance with Semiconductor and Component Industry Standards and Regulations
  The chamber ensures testing is conducted in accordance with strict industry requirements, facilitating certification and market acceptance of semiconductor products.